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Electrical Characterization of Ge Nanocrystals in Oxide Matrix

Published online by Cambridge University Press:  25 May 2011

Ivana Capan ,
Maja Buljan ,
Tea Misic-Radic ,
Branko Pivac ,
Nikola Radic ,
Joerg Grenzer ,
Vaclav Holy ,
S. Levichev  and
Sigrid Bernstorff
Ivana Capan
Affiliation:
Ruđer Bošković Institute, 10000 Zagreb, Croatia
Maja Buljan
Affiliation:
Ruđer Bošković Institute, 10000 Zagreb, Croatia
Tea Misic-Radic
Affiliation:
Ruđer Bošković Institute, 10000 Zagreb, Croatia
Branko Pivac
Affiliation:
Ruđer Bošković Institute, 10000 Zagreb, Croatia
Nikola Radic
Affiliation:
Ruđer Bošković Institute, 10000 Zagreb, Croatia
Joerg Grenzer
Affiliation:
Forschungszentrum Dresden-Rossendorf, 01314 Dresden, Germany
Vaclav Holy
Affiliation:
Charles University in Prague, 12116 Prague, Czech Republic
S. Levichev
Affiliation:
University of Minho, 4710-057 Braga, Portugal
Sigrid Bernstorff
Affiliation:
Sincrotrone Trieste, 34012 Basovizza, Italy
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Abstract

We report on electrical properties in [(Ge+SiO2)/SiO2]×2 films deposited by magnetron sputtering on a periodically corrugated-rippled substrate and annealed in vacuum and forming gas. The rippled substrate caused a self-ordered growth of Ge quantum dots, while annealing in different environments enabled us to separate charge trapping in quantum dots from the trapping at the dot-matrix and matrix-substrate interfaces. We show that the charge trapping occurs mainly in Ge quantum dots in the films annealed in the forming gas, while Si–SiO2 interface trapping is dominant for the vacuum annealed films.

Keywords

electronic materialdeep level transient spectroscopy (DLTS)Ge
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1305: Symposium AA – Group IV Semiconductor Nanostructures and Applications , 2011 , mrsf10-1305-aa17-01
Copyright
Copyright © Materials Research Society 2011

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References

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