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Electro-Optic Materials by Solid Source MOCVD

Published online by Cambridge University Press:  15 February 2011

R. Hiskes ,
S. A. Dicarolis ,
J. Fouquet ,
Z. Lu ,
R. S. Feigelson ,
R. K. Route ,
F. Leplingard  and
C. M. Foster
R. Hiskes
Affiliation:
Hewlett-Packard Laboratories, 3500 Deer Creek Road, Palo Alto, CA 94303
S. A. Dicarolis
Affiliation:
Hewlett-Packard Laboratories, 3500 Deer Creek Road, Palo Alto, CA 94303
J. Fouquet
Affiliation:
Hewlett-Packard Laboratories, 3500 Deer Creek Road, Palo Alto, CA 94303
Z. Lu
Affiliation:
Stanford University, Department of Materials Science and Engineering, Stanford, CA 94305-2205
R. S. Feigelson
Affiliation:
Stanford University, Department of Materials Science and Engineering, Stanford, CA 94305-2205
R. K. Route
Affiliation:
Center for Materials Research, Stanford University, Stanford, CA 94305-4045
F. Leplingard
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
C. M. Foster
Affiliation:
Argonne National Laboratory, 9700 Cass Avenue, Argonne, IL 60439
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Abstract

The solid source MOCVD technique1,2, employing a single powder vaporization source composed of mixed beta-diketonate metalorganic compounds, has been used to grow thin films of a variety of electro-optic materials, including lithium niobate, strontium barium niobate, and potassium niobate. Results for potassium niobate films are quite preliminary, but indicate that a volatile potassium organometallic source can be synthesized which is useful for growing potassium niobate by MOCVD. High quality single phase (001) oriented strontium barium niobate films have been deposited which exhibit waveguiding behavior. The most extensive work has been done on lithium niobate, which has been deposited epitaxially on a variety of substrates. Oriented z-axis (001) films have been grown on c-axis sapphire with and without a (111) oriented platinum base electrode and on a bulk grown lithium niobate substrate. Films grown directly on c-axis sapphire at 700 C exhibit x-ray rocking curve linewidths as low as.044 degrees, nearly perfect in-plane orientation as determined by x-ray phi scans, and peak-to-peak surface roughness less than 40 Å. Optical waveguiding has been demonstrated by a single prism coupling technique on similar films 1175 – 2000 Å thick grown at 500 C, with optical losses of approximately 2 db/cm at 632.8 nm measured over 3.5 cm long films. Polarization vs. electric field measurements on 1100 Å thick films grown on platinum show a hysteresis loop indicating ferroelectric behavior.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 335: Symposium Y – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics , 1993 , 299
Copyright
Copyright © Materials Research Society 1994

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