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Published online by Cambridge University Press: 30 December 2014
A solid-state nanopore was integrated into an optofluidic sensor chip, liquid-core anti-resonant reflecting optical waveguide (ARROW). The solid-state nanopore worked as a smart gate, which simultaneously provided characteristic electrical signals and controlled the entry of single nanoparticles into the liquid-core channel. The subsequent fluorescence detection further identified the nanoparticles by providing optical signals within a specific wavelength range. In this work, correlated electrical and optical detection of single nanoparticles, H1N1 viruses, and λ-DNA molecules was demonstrated. Different types of particles in a mixture were successfully discriminated. Moreover, the flow velocity in the liquid-core channel was extracted with the help of combined analysis of electrical and optical signals. Enhanced electrical sensitivity using a solid-state nanopore with a thin limiting aperture sculpted by SiO2 deposition was also shown.