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Epitaxial lift-off of strontium titanate thin films and the temperature dependence of the low frequency dielectric properties of the films

Published online by Cambridge University Press:  10 February 2011

M. J. Dalberth ,
J. C. Price  and
C. T. Rogers
M. J. Dalberth
Affiliation:
University of Colorado-Boulder, Department of Physics, Boulder CO 80309-0390
J. C. Price
Affiliation:
University of Colorado-Boulder, Department of Physics, Boulder CO 80309-0390
C. T. Rogers
Affiliation:
University of Colorado-Boulder, Department of Physics, Boulder CO 80309-0390
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Abstract

Using pulsed laser ablation, we have grown epitaxial bilayers of strontium titanate (STO) and yttrium barium copper oxide (YBCO) on lanthanum aluminate (LAO) and neodymium gallate (NGO) substrates. Using a selective acid etch, we have removed the YBCO from the middle of the bilayer and lifted off the strontium titanate films from their parent substrates. Using coplanar interdigital capacitors patterned on the films' surface, we have measured the dielectric constant and loss as a function of frequency and temperature and have resolved frequency dependent loss peaks which indicate thermally activated behavior. Also, by applying a dc bias to the capacitor, we have seen tuning of the lifted off films' dielectric constants that compares favorably to films attached to substrates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 371
Copyright
Copyright © Materials Research Society 1998

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References

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