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Er-Doped Amorphous and Crystalline Al2O3 and La2O3 Films Grown with Low Energy Ions From an Ecr Plasma

Published online by Cambridge University Press:  03 September 2012

J. C. Barbour ,
B. G. Potter ,
D. M. Follstaedt ,
J. A. Knapp  and
M. B. Sinclair
J. C. Barbour
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1056
B. G. Potter
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1056
D. M. Follstaedt
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1056
J. A. Knapp
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1056
M. B. Sinclair
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1056
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Abstract

The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γA12O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 465
Copyright
Copyright © Materials Research Society 1997

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References

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