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Esr Of Defects In Surface Conduction Layer On Cvd Diamond Films

Published online by Cambridge University Press:  10 February 2011

Y. Show ,
M. Iwase  and
T. Izumi
Y. Show
Affiliation:
Faculty of Engineering, Tokai university, 1117, Kitakaname, Hiratsuka, Kanagawa, Japan
M. Iwase
Affiliation:
Faculty of Engineering, Tokai university, 1117, Kitakaname, Hiratsuka, Kanagawa, Japan
T. Izumi
Affiliation:
Faculty of Engineering, Tokai university, 1117, Kitakaname, Hiratsuka, Kanagawa, Japan
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Abstract

Defects in the surface conductive layer of CVD-diamond films have been investigated by ESR method. ESR analysis revealed that defect center ( Pac-center: g=2.003, ΔΔ Hpp=8 Oe ) in the non-diamond phase carbon region exists in the surface conductive layer. The Pac-center with a spin density of the order of 1020spins/cm3 or above was formed in the surface layer by hydrogen radical irradiation during the diamond deposition. Formation of the Pac-center causes the resistivity of CVD-diamond to decrease ( from 9 × 108 Ω to 1.8 × 106 Ω )

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 169
Copyright
Copyright © Materials Research Society 1996

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References

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