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Evaluation of Electric Potential at Metal-Insulator Interface Using Electron Spectroscopy and Kelvin Probe Techniques

Published online by Cambridge University Press:  26 February 2011

Michiko Yoshitake
Michiko Yoshitake*
Affiliation:
yoshitake.michiko@nims.go.jp, NIMS, 3-13, Sakura, Tsukuba, Ibaraki, 305-0003, Japan
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Abstract

The potential of applying photoelectron spectroscopic and Kelvin probe methods for the interface potential evaluation of materials prepared by combinatorial processes is demonstrated. The physical basis for the evaluation of the interface potential by photoelectron spectroscopy is given. Then, the imaging capability of photoelectron spectroscopy is demonstrated using a two-dimensionally patterned specimen. Finally, the examples of interface potential evaluation with photoelectron spectroscopy and Kelvin probe are presented. Through the evaluation of interface potential with this method, it is possible to deduce the energy level diagram across the interface between two materials with different electron properties.

Keywords

x-ray photoelectron spectroscopy (XPS)insulatorelectronic structure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 894: Symposium LL – Combinatorial Methods and Informatics in Materials Science , 2005 , 0894-LL02-02
Copyright
Copyright © Materials Research Society 2006

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References

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