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Exafs Study of a-Si1−xGex:H, a-Si1−x Cx:H and a-Si1−xNx:H at the Si K-Edge

Published online by Cambridge University Press:  26 February 2011

A. Filipponi ,
P. Fiorini ,
F. Evangelisti  and
S. Mobilio
A. Filipponi
Affiliation:
Dipartimento di Fisica, Universita' “La Sapienza”, 00185 Roma, Italy
P. Fiorini
Affiliation:
Dipartimento di Fisica, Universita' “La Sapienza”, 00185 Roma, Italy
F. Evangelisti
Affiliation:
Dipartimento di Fisica, Universita' “La Sapienza”, 00185 Roma, Italy
S. Mobilio
Affiliation:
INFN-Laboratori Nazionali di Frascati, C.P.13, 00044 Frascati, Italy
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Abstract

The structure of three series of hydrogenated amorphous Si-based alloys was studied by EXAFS at the Si K-edge. Average bond-lengths and first shell compositions were determined. It is shown that the two atomic species are randomly distributed in a-Si1−xGex:H whereas a chemical ordered composition is favored in a-Si1−xNx:H

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 95: Symposium E – Amorphous Silicon Semiconductors--Pure and Hydrogenated , 1987 , 305
Copyright
Copyright © Materials Research Society 1987

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References

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