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Excimer Laser Removal of Cr Contaminants from Polyimide Surfaces for Packaging Applications

Published online by Cambridge University Press:  25 February 2011

Gouri Radhakrishnan ,
Nicholas Marquez  and
Heinrich MÜller
Gouri Radhakrishnan
Affiliation:
The Aerospace Corporation, MS M2-241, P.O. Box 92957, Los Angeles, CA 90009
Nicholas Marquez
Affiliation:
The Aerospace Corporation, MS M2-241, P.O. Box 92957, Los Angeles, CA 90009
Heinrich MÜller
Affiliation:
Microelectronics and Computer Technology Corporation, 12100 Technology Blvd., Austin, TX 78727
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Abstract

Excimer laser radiation at 248 nm has been used for the maskless and selective removal of chromium (Cr) contamination from polyimide surfaces containing gold (Au) metallizations. Ablation thresholds and rates have been determined in air, vacuum, and oxygen. These results have been used to establish the optimum ablation medium and a corresponding process window that allows for selective removal of Cr from polyimide. The substantial differences between the ablated and unexposed regions of the polyimide surface have been established by electrical measurements, while the variations in their respective surface morphologies have been examined using optical and scanning electron microscopy. Quantitative determinations of Cr on the ablated and unablated regions of polyimide have been performed, using secondary ion mass spectrometry, to establish the threshold for the complete removal of Cr.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 236: Symposium B – Photons and Low Energy Particles in Surface Processing , 1991 , 77
Copyright
Copyright © Materials Research Society 1992

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