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Fabrication of Micro-Fluid-Channel Structures by Focused Ion Beam Techniques

Published online by Cambridge University Press:  31 January 2011

Junichi Yanagisawa ,
Hiroaki Kobayashi ,
Kakunen Koreyama  and
Yoichi Akasaka
Junichi Yanagisawa
Affiliation:
yanagisawa.j@usp.ac.jp, The University of Shiga Prefecture, School of Engineering, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan, 81-749-28-8371
Hiroaki Kobayashi
Affiliation:
hiroaki@nano.ee.es.osaka-u.ac.jp, Osaka University, Toyonaka, Japan
Kakunen Koreyama
Affiliation:
koreyama@nano.ee.es.osaka-u.ac.jp, Osaka University, Toyonaka, Japan
Yoichi Akasaka
Affiliation:
akasaka@ee.es.osaka-u.ac.jp, Osaka University, Toyonaka, Japan
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Abstract

One of the new applications of focused Ga ion beam (Ga FIB) techniques to fabricate micro fluid channels on plate glass was demonstrated. After discussing features of the FIB etched patterns, narrow channel or Y-shaped channels were fabricated by FIB etching on a patterned plate glass which was prepared by photo-lithography and wet etching processes. Micro fluid devices were then constructed using polydimethylsiloxane (PDMS) sheet and silicone rubber tubes and the water (or ink) flow in the devices was observed under a microscope using a syringe pump. Although no discussion based on fluid mechanics has done at present, the present results indicate a possibility of applying FIB techniques to fabricate micro fluid devices which can be used in bio- and/or chemical-related fields.

Keywords

ion-beam processingmicroelectro-mechanical (MEMS)fluidics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1181: Symposium DD – Ion Beams and Nano-Engineering , 2009 , 1181-DD03-01
Copyright
Copyright © Materials Research Society 2009

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References

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