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Fe-Cr-N Based Nanocrystalline Soft Magnetic Thin Films

Published online by Cambridge University Press:  15 February 2011

W. Zhu ,
T. H. Tiefel ,
S. Jin ,
R. B. Van Dover  and
V. Korenivski
W. Zhu
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
T. H. Tiefel
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
S. Jin
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
R. B. Van Dover
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
V. Korenivski
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974
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Abstract

We have investigated the soft magnetic properties of new Fe-Cr-Ta-N and Fe-Cr-Hf-N alloy films. Thin films with compositions in the range of Fe-2∼8%Cr-0∼l%Ta (or Hf)-5∼10%N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post-deposition heat treatment, e.g., Hc∼l-2 Oe and 4πMs∼15–20 kG. The magnetic properties are highly anisotropie in the film plane as the easy-axis M-H loop is square and the hard-axis loop is linear and closed, with the anisotropy field Ha=20–100 Oe. The films exhibit excellent high frequency behavior even in the GHz frequency range which is attributed to the combination of high 4πMs and relatively high Ha.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 475: Symposium M – Magnetic Ultrathin Films, Multilayers, and Surfaces – 1997 , 1997 , 445
Copyright
Copyright © Materials Research Society 1997

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References

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