Hostname: page-component-6bf8c574d5-mggfc Total loading time: 0 Render date: 2025-02-22T07:57:38.903Z Has data issue: false hasContentIssue false
  • English
  • Français

Film Bulk Acoustic Resonators for Parallel Mass Sensing

Published online by Cambridge University Press:  21 November 2011

Shih-Jui Chen ,
Anderson Lin ,
Lukas Baumgartel  and
Eun Sok Kim
Shih-Jui Chen
Affiliation:
Department of Electrical Engineering, University of Southern California, CA 90089, USA.
Anderson Lin
Affiliation:
Department of Electrical Engineering, University of Southern California, CA 90089, USA.
Lukas Baumgartel
Affiliation:
Department of Physics, University of Southern California, CA 90089, USA.
Eun Sok Kim
Affiliation:
Department of Electrical Engineering, University of Southern California, CA 90089, USA.
Get access

Abstract

This paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment. Various ligands were immobilized on the gold layer on the FBAR’s sensing surface for selective protein detection. The FBARs of the arrayed FBAR were fabricated to have different resonant frequencies from one another by adding slightly varied amount of mass loading on the resonators. Results showed that the arrayed FBAR could detect specific bindings on its surfaces as the concentration of the target ligand was varied.

Keywords

acousticpiezoelectricdevices
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1348: Symposium CC – Hybrid Interfaces and Devices , 2011 , mrss11-1348-cc03-04
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Zhu, H., Snyder, M., Curr. Opin. Chem. Biol. 7, 55–63 (2003).Google Scholar
2. Myszka, D.G., Anal. Biochem, 329, 316–323 (2004).Google Scholar
3. Ruby, R.C., Bradley, P., Oshmyansky, Y., Chien, A., Larson, J.D. III, IEEE Ultrasonics Symposium, 2001, pp. 813–821.Google Scholar
4. Zhang, H., Pang, W., Marma, M.S., Lee, C.Y., Kamal-Bahl, S., Kim, E.S., McKenna, C.E., Appl. Phys. Lett. 96, 123702 (2010).Google Scholar
5. Larson, J.D. III, Oshmyansky, Y., IEEE Ultrasonics Symposium, 2002, pp. 939–943.Google Scholar
6. Martin, S.J., Granstaff, V.E., Frye, G.C., Anal. Chem. 63 (20), 2272-2281 (1991).Google Scholar
7. Sauerbrey, G., Z. Phys. 155, 206–222, (1959).Google Scholar
8. Zhang, H. and Kim, E.S., IEEE/ASME J. Microelectromech. S., 14(4), 699–706 (2005).Google Scholar