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The Fine Structure of the Mn Distribution in ZnO Layers Deposited by Magnetron Sputtering for Spintronic Application

Published online by Cambridge University Press:  01 February 2011

Morad Abouzaid  and
Pierre Ruterana
Morad Abouzaid
Affiliation:
morad.abouzaid@ensicaen.fr, ENSCAEN, SIFCOM, 6, Bd Marechal Juin, Caen, 14050, France
Pierre Ruterana
Affiliation:
pierre.ruterana@ensicaen.fr, ENSCAEN, SICOM, 6, Bd Marechal Juin, Caen, 14050, France, 33231452653, 33231452660
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Abstract

In this work, we carry out structural analysis of ferromagnetic Mn-doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM) and high resolution x-ray diffraction. On top of sapphire (0001) substrates, Mn rich precipitates and an interface reaction layer are observed following the deposition of Zn(Mn)O layers above 500°C. The crystalline quality of ZnO layers deposited by magnetron sputtering is highly improved at 500°C as well as the measured ferromagnetic response.

Keywords

transmission electron microscopy (TEM)ferromagneticsemiconducting
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 999: Symposium K – Novel Semiconductor Materials for Room-Temperature Ferromagnetism , 2007 , 0999-K06-03
Copyright
Copyright © Materials Research Society 2007

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