Hostname: page-component-78c5997874-lj6df Total loading time: 0 Render date: 2024-11-10T11:56:40.806Z Has data issue: false hasContentIssue false
  • English
  • Français

Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles

Published online by Cambridge University Press:  30 September 2013

Ashley E. Wayman ,
Daniel K. Turner ,
Ashwani Rawat ,
Colin T. Carver ,
Mansour Moinpour  and
Edward E. Remsen
Ashley E. Wayman
Affiliation:
Mund-Lagowski Department of Chemistry and Biochemistry, Bradley University, Peoria, IL 61625, U.S.A.
Daniel K. Turner
Affiliation:
Mund-Lagowski Department of Chemistry and Biochemistry, Bradley University, Peoria, IL 61625, U.S.A.
Ashwani Rawat
Affiliation:
Fab Materials Operation, Intel Corporation, Santa Clara, CA 95052, U.S.A.
Colin T. Carver
Affiliation:
Components Research, Intel Corporation, Hillsboro, OR 97124, U.S.A.
Mansour Moinpour
Affiliation:
Fab Materials Operation, Intel Corporation, Santa Clara, CA 95052, U.S.A.
Edward E. Remsen
Affiliation:
Mund-Lagowski Department of Chemistry and Biochemistry, Bradley University, Peoria, IL 61625, U.S.A.
Get access

Abstract

Additive-abrasive interactions in chemical-mechanical planarization (CMP) slurries are investigated using fluorescence correlation spectroscopy (FCS). The FCS technique provides quantitative determinations of the interaction between additives and abrasive particles by characterizing the competitive adsorption of the additive and a fluorescent probe molecule by an abrasive particle. Adsorption of the CMP additives glycine and benzotriazole (BTA) on precipitated and sol-gel colloidal silica abrasives are characterized. Significant differences in the fluorescent probe’s adsorption to the different silica abrasives in the presence of the additives suggest surface chemistry differences between the different types of silica. Extensions of the analysis of FCS data are proposed for improving the quantitative determination of the competitive adsorption of fluorescent probe dyes and CMP additives on abrasive particles.

Keywords

CMPadsorptionluminescence
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1560: Symposium BB – Evolutions in Planarization—Equipment, Materials, Techniques and Applications , 2013 , mrss13-1560-bb04-04
Copyright
Copyright © Materials Research Society 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

White, D., Parker, J., Li, S. and Vinayak, D., Proc. Mater. Res. Soc. 991, 145–150 (2007).Google Scholar
White, D., Parker, J. and Nagarajan, R.., Proc. Mater. Res. Soc., 1249, 1249–E04-04 (2010).Google Scholar
Gell, C., Brockwell, D. and Smith, A., Handbook of Single Molecule Fluorescence Spectroscopy, (Oxford University Press, New York, 2006) pp. 24–44.Google Scholar
Turner, D.K., Wayman, A.E., Rolando, C.N., Dande, P., Carter, P. and Remsen, E.E., Appl. Spectrosc., 2013 (accepted for publication).Google Scholar
Haustein, E. and Schwille, P., Annu. Rev. Biophys. Biomol. Struct. 36, 151 (2007).CrossRefGoogle Scholar
Cheemalapati, K., Keleher, J. and Li, Y., in Microelectronic Applications of Chemical Mechanical Planarization, edited by Li, Y. (John Wiley & Sons, New York, 2008), pp. 214–217.Google Scholar
Einstein, A., Investigations on the Theory of the Brownian Motion, (Dover, New York, 1956).Google Scholar
Debye, P., Polar Molecules, (Dover, New York, 1929).Google Scholar
Kask, P., Piksarv, P., Pooga, M., and Lippmaa, E., Biophys J. 55, 213 (1989).CrossRefGoogle Scholar
Aragon, S. and Pecora, R., Biopolymers 14, 119 (1975).CrossRefGoogle Scholar