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Germanium ALD/CVD Precursors for Deposition of Ge/GeTe Films

Published online by Cambridge University Press:  01 February 2011

William Hunks ,
Philip S. Chen ,
Tianniu Chen ,
Matthias Stender ,
Gregory T. Stauf ,
Leah Maylott ,
Chongying Xu  and
Jeffrey F. Roeder
William Hunks
Affiliation:
whunks@atmi.com, ATMI, Chemistry, 7 Commerce Dr., Danbury, CT, 06810, United States
Philip S. Chen
Affiliation:
pchen@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
Tianniu Chen
Affiliation:
tchen@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
Matthias Stender
Affiliation:
mstender@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
Gregory T. Stauf
Affiliation:
gstauf@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
Leah Maylott
Affiliation:
lmaylott@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
Chongying Xu
Affiliation:
cxu@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
Jeffrey F. Roeder
Affiliation:
jroeder@atmi.com, ATMI, 7 Commerce Dr., Danbury, CT, 06810, United States
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Abstract

In order to deposit conformal films in the high aspect ratio trench and via structures in future high-density phase-change memory devices, suitable ALD/CVD precursors are needed. We report on the development of novel germanium(II) metal-organic ALD/CVD precursors containing amide, cyclopentadienyl, and amidinate ligands. The physical properties, volatility, and thermal behavior of the precursors were evaluated by simultaneous thermal analysis (STA) and vapor pressure measurements. Stability studies were conducted to investigate the suitability of the precursors for use as ALD/CVD precursors for device manufacturing.

Keywords

chemical vapor deposition (CVD) (deposition)Gethermogravimetric analysis (TGA)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1071: Symposium F – Materials Science and Technology for Nonvolatile Memories , 2008 , 1071-F09-11
Copyright
Copyright © Materials Research Society 2008

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References

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