Hostname: page-component-745bb68f8f-grxwn Total loading time: 0 Render date: 2025-01-28T14:11:17.511Z Has data issue: false hasContentIssue false
  • English
  • Français

Glancing Angle X-Ray Study of Crystallization of Amorphous Ge at the Ge-A1 Interface

Published online by Cambridge University Press:  25 February 2011

S. M. Heald ,
J. K. D. Jayanetti  and
R. C. Budhani
S. M. Heald
Affiliation:
Brookhaven National Laboratory, Upton NY 11973
J. K. D. Jayanetti
Affiliation:
Brookhaven National Laboratory, Upton NY 11973
R. C. Budhani
Affiliation:
Brookhaven National Laboratory, Upton NY 11973
Get access

Abstract

The amorphous to crystalline transformation of Ge in Al/Ge thin film couples has been studied using glancing angle EXAFS, x-ray reflectivity and diffraction. It was found that crystallization occurs at a much lower temperature (118-150 °C) than for bulk Ge, and initiates at the Al/Ge interface. X-ray diffraction studies were made at 152 °C to study the kinetics of the reaction. After an initial period we find good agreement with a square root dependence of the time, characteristic of a diffusion limited reaction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 651
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Oki, F., Ogawa, Y. and Fujiki, Y., Jap. J. Appl. Phys. 8, 1056 (1969).Google Scholar
2. Herd, S. R., Chaudhari, P., and Brodsky, M. H., J. of Non-crystalline Sol. 7, 309 (1972).Google Scholar
3. Bosnell, J. R. and Voisey, U. C., Thin Solid Films 6, 161 (1970).Google Scholar
4. Barna, A., Barna, P. B. and Pocza, J. F., J. of Non-crystalline Sol. 8, 36 (1972).Google Scholar
5. Koster, U., Campbell, D. R. and Tu, K. N., Thin Solid Films 53, 129 (1978).Google Scholar
6. Sevenhans, W., and Locquet, J.-P., Bruynseraede, Y., Homma, H., and Schuller, I. K., Physica Scripta 38, 426 (1988).Google Scholar
7. Poate, J. M., Linnros, J., Priola, F., Jacobson, D. C., Batstone, J. L. and Thompson, M. O., Phys. Rev. Lett. 60, 1322 (1988).Google Scholar
8. Heald, S. M., Chen, H., and Tranquada, J. M., Phys. Rev. B 38, 1016 (1988).Google Scholar
9. Chen, H. and Heald, S. M., J. Appl. Phys. 66, 1793 (1989).Google Scholar