Hostname: page-component-78c5997874-8bhkd Total loading time: 0 Render date: 2024-11-14T05:38:32.597Z Has data issue: false hasContentIssue false
  • English
  • Français

High Harmonic Surface Acoustic Wave Devices for Harsh Environment Sensor Applications

Published online by Cambridge University Press:  16 January 2013

J. Justice ,
M. Elbaz ,
L. E. Rodak  and
D. Korakakis
J. Justice
Affiliation:
Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV 26506 U.S.A.
M. Elbaz
Affiliation:
Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV 26506 U.S.A.
L. E. Rodak
Affiliation:
Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV 26506 U.S.A.
D. Korakakis
Affiliation:
Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV 26506 U.S.A.
Get access

Abstract

Surface acoustic wave (SAW) devices are ideal candidates for gas sensors due to their small size, low cost of production and high sensitivity. Increasing restrictions on pollution and emissions create the necessity for sensors that can operate in the harsh environments found in vehicle exhaust systems and industrial production. Gallium nitride (GaN) is a robust, chemically inert, piezoelectric semiconductor, making it an attractive material for SAW devices designed to detect and monitor gases in harsh environments. In this work, SAW devices designed to operate at the 5th and 7th harmonics are fabricated on GaN thin films and their performance is measured through insertion loss, signal to noise ratio, operating frequency and quality factor. Devices are directly exposed to the exhaust gas of a common diesel engine. Device performance is then re-measured and compared. SAW devices fabricated in this work have measured operating frequencies above 1 GHz, and quality factors up to and higher than 2000, depending on the harmonic mode. SAW devices on GaN showed good chemical stability and measured changes in device performance after exhaust exposure was negligible.

Keywords

III-Vacousticsensor
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1519: Symposium MM – Materials under Extreme Environments , 2013 , mrsf12-1519-mm11-06
Copyright
Copyright © Materials Research Society 2013

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Kato, N., Nakagaki, K., and Ina, N., SAE Paper 960\334, 137, (1996).Google Scholar
Miura, N., Lu, G., Yamazoe, N., Kurosawa, H., and Hasei, M., J. Electrochem. Soc., 143(2), 33 (1996).10.1149/1.1836448CrossRefGoogle Scholar
Nakanouchi, Y., Kurosawa, H., Hasei, M., Yan, Y., and Kunimoto, A., SAE Paper 961\130, 11, (1996).Google Scholar
Gopel, W., Guth, U., Reinhardt, G., and Rosch, M., Sensor, B6(1), 125 (1999).Google Scholar
Guth, U., Sandow, K.P., Adolf, F., and Roth, B., Sensor, B6(2) 131 (1999).Google Scholar
Dooly, G. Fitzpatrick, C. Chambers, P. Lewis, E., , Sensors, Proc. IEEE, 1287 (2000).Google Scholar
Lewis, E, Opto-Elec. and Comm. Con., 1 (2009).Google Scholar
Ballantine, D.S. Jr. et al. ., “Acoustic Wave Sensors: Theory, Design, & Physico-Chemical Applications”, 1st ed., (Academic Press, 1996).Google Scholar
Justice, J. Lee, K. Korakakis, D. Ultrason. Ferroelec. and Freq. Con., IEEE Trans., 59(8), 1806 (2012).10.1109/TUFFC.2012.2385CrossRefGoogle Scholar
Justice, J., Rodak, L.E., Narang, V., Lee, K., Hornak, L.A. and Korakakis, D., Mater. Res. Soc. Symp. Proc., 1299, 29–34 (2011).10.1557/opl.2011.396CrossRefGoogle Scholar