Hostname: page-component-6bf8c574d5-xtvcr Total loading time: 0 Render date: 2025-02-22T20:39:30.397Z Has data issue: false hasContentIssue false
  • English
  • Français

Influence of Tipradius and Substrate on the Nanotribological Characterization of Thin DLC Coatings

Published online by Cambridge University Press:  17 March 2011

Thorsten Staedler  and
Kirsten I. Schiffmann
Thorsten Staedler
Affiliation:
Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, GERMANY
Kirsten I. Schiffmann
Affiliation:
Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, GERMANY
Get access

Abstract

In this work diamond-like carbon films deposited via plasma enhanced chemical vapor deposition with a thickness of 250nm on different substrates are characterized by nanoindentation and microscratching in combination with scanning probe microscopy. The substrates (SU8 photoresist, quartz glass, Si(100) and AlTiC ceramic) provide a wide range of combinations between film and substrate properties. The experimental configuration allows the testing of samples with loads between 1μN and 10mN and a high local resolution. The tribological response of the various film/substrate systems is analysed in two different ways. A single scratch test with linear increasing load and an oscillating wear tests at constant loads is used. The tip radii of the conical diamond tips utilized vary between 0.6 and 6μm. Both, the substrates as well as the tip radii, show a significant influence on the tribological behavior of the systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 649: Symposium Q – Fundamentals of Nanoindentation & Nanotribology II , 2000 , Q9.3
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lifshitz, Y., Diamond and Related Materials, 8, 1659, 1998 Google Scholar
2. Gupta, B. K. and Bhushan, B., Wear, 190, 110, 1995 Google Scholar
3. Fabes, B. D., Oliver, W. C., McKee, R. A. and Walker, F. J., J. Mater. Res., 7, 3056, 1992 Google Scholar
4. Swain, M. V. and Weppelmann, E. R., Mat. Res. Soc. Symp. Proc., 308, 177, 1993 Google Scholar
5. Menčik, J. and Swain, M.V., J.Mat.Res., 10, 1491, 1995 Google Scholar
6. Tsui, T. Y. and Pharr, G. M., J. Mas. Res., 14, 1999 Google Scholar
7. Bhushan, B., Diamond and Related Materials, 8, 1985, 1999 Google Scholar
8. Scharf, T. W. and Barnard, J. A., Thin Solid Films 308–309, 340, 1997 Google Scholar
9. Oliver, W. C. and Pharr, G. M., J. Mat. Res., 7, 1564, 1992 Google Scholar
10. Cai, X. and Bangert, H., Thin Solid Films 264, 59, 1995 Google Scholar
11. Hainsworth, S. V., Chandler, H. W. and Page, T. F., J. Mater. Res., 11, 1987, 1996 Google Scholar
12. McGurk, M. R. and Page, T. F., J. Mater. Res., 14, 2283, 1999 Google Scholar
13. Staedler, T. and Schiffmann, K. I., to be published in Advanced Engineering MaterialsGoogle Scholar
14. Johnson, K. L., Contact mechanics, Cambridge University Press, 1985 Google Scholar
15. Schwarz, U. D., Zwörner, O., Köster, P. and Wiesendanger, R., Physical Review B, 56, 1997 Google Scholar
16. Sasada, T. and Nakabayashi, H., IEICE Trans. Electron., E81–C, No. 3, 1998 Google Scholar
17. Mosch, S., Grau, P. and Berg, G., Mat. Res. Soc. Symp. Proc., 522, 415, 1998 Google Scholar
18. F. Bowden, P. and Tabor, D., The friction and lubrication of solids, Clarendon Press, Oxford, 1954 Google Scholar
19. Hay, J. C. and Pharr, G. M., Mat. Res. Soc. Symp. Proc., 505, 65, 1998 Google Scholar
20. Tsui, T. Y., Vlassak, J. and Nix, W. D., J. Mater. Res., 14, 2204, 1999 Google Scholar
21. Timoshenko, S. and Woindowsky-Krieger, S., Theory of plates and shells, Second Edition, McGraw-Hill Book Company Inc., New York, 1959 Google Scholar
22. McGurk, M. R. and Page, T. F., Surface and Coatings Technology, 92, 87, 1997 Google Scholar