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Inorganic-Organic Composites (Ormocers) as Structured Layers for Microelectronics

Published online by Cambridge University Press:  28 February 2011

Michael Popall ,
Henning Meyer ,
Helmut Schmidt  and
Jochen Schulz
Michael Popall
Affiliation:
Fraunhofer-Institut für Silicatforschung,Neunerplatz 2,D-8700 Würzburg,F.R.G.
Henning Meyer
Affiliation:
Fraunhofer-Institut für Silicatforschung,Neunerplatz 2,D-8700 Würzburg,F.R.G.
Helmut Schmidt
Affiliation:
Institut für Neue Materialien der Universität Saarbrücken,Im Stadtwald,Gebäude 43,D-6600 Saarbrücken,F.R.G.
Jochen Schulz
Affiliation:
Fraunhofer-Institut für Silicatforschung,Neunerplatz 2,D-8700 Würzburg,F.R.G.
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Abstract

Enhanced integration, faster signal transmission and reduced size of mounting devices in components for microelectronics requires new patternable materials. Inorganic-organic copolymers (ORMOCERs = ORganically MOdified CERamics), prepared by sol-gel techniques have been developed for interconnection technologies in microelectronics. Photopolymerization is enabled by unsaturated hydrocarbon or epoxide substituents and UV-sensitive initiators. Using a frequency doubled Argonion laser at 257 nm for direct laser writing, patterned layers with high edge quality have been realized. In combination with high breakthrough voltages, low permittivity constants and high bulk resistivities they open interesting aspects for very large system integration techniques (VLSI).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 995
Copyright
Copyright © Materials Research Society 1990

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References

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