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In-Situ Caiciss Study Of Dynamic Process Of Oxygen Desorption On TiO2-Terminated SrTiO3(001) Surface

Published online by Cambridge University Press:  15 February 2011

T. Nishihara ,
O. Ishiyama ,
S. Hayashi ,
M. Shinohara ,
M. Yoshimoto ,
T. Ohnishi  and
H. Koinuma
T. Nishihara
Affiliation:
Surface Analysis & Semiconductor Equipment Dept. Shimadzu Corp., 380–1 Horiyamashita, Hadano, 259–13, Japan, rocky@shimadzu.co.jp
O. Ishiyama
Affiliation:
Surface Analysis & Semiconductor Equipment Dept. Shimadzu Corp., 380–1 Horiyamashita, Hadano, 259–13, Japan, rocky@shimadzu.co.jp
S. Hayashi
Affiliation:
Surface Analysis & Semiconductor Equipment Dept. Shimadzu Corp., 380–1 Horiyamashita, Hadano, 259–13, Japan, rocky@shimadzu.co.jp
M. Shinohara
Affiliation:
Surface Analysis & Semiconductor Equipment Dept. Shimadzu Corp., 380–1 Horiyamashita, Hadano, 259–13, Japan, rocky@shimadzu.co.jp
M. Yoshimoto
Affiliation:
Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama, 226, Japan
T. Ohnishi
Affiliation:
Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama, 226, Japan
H. Koinuma
Affiliation:
Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuda, Midori-ku, Yokohama, 226, Japan
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Abstract

The topmost atoms of TiO2 - terminated SrTiO3(001) annealed at temperatures between room temperature and 800°C in ultra high vacuum (UHV), have been studied by means of in-situ coaxial impact collision ion scattering spectroscopy (CAICISS). Both time-of-flight spectra at the incident angle of 45.0°C along [ 100] azimuth and of 35.3°C along [110] azimuth revealed Ti and weak O peaks and no Sr peak at 150°C, which means that the topmost layer at 150°C is terminated by TiCh-plane, completely. On the other hand, as increasing the substrate temperature, Sr peak began to appear above 400°C. This Sr peak intensity from both directions was drastically increased with elevating the substrate temperature. This indicates that the topmost O and Ti atoms desorb from the surface at the higher substrate temperature. The ratio Sr/Ti corresponds to the amount of the topmost oxygen or titanium vacancies due to the desorption. It was found that 40 % of the topmost oxygen atoms and 32% of the topmost titanium atoms desorb from TiO2-terminated SrTiO3(001) surface at 800°C. The activation energies for oxygen and titanium desorption were 0.28eV and 0.40eV, respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 474: Symposium L – Epitaxial Oxide Thin Films III , 1997 , 389
Copyright
Copyright © Materials Research Society 1997

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References

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