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Instantaneous Fluid Film Imaging in Chemical Mechanical Planarization

Published online by Cambridge University Press:  01 February 2011

Daniel Apone ,
Caprice Gray ,
Chris Rogers ,
Vincent P. Manno ,
Chris Barns ,
Mansour Moinpour ,
Sriram Anjur  and
Ara Philipossian
Daniel Apone
Affiliation:
Tufts University, Department of Mechanical Engineering, Medford, MA, USA
Caprice Gray
Affiliation:
Tufts University, Department of Mechanical Engineering, Medford, MA, USA
Chris Rogers
Affiliation:
Tufts University, Department of Mechanical Engineering, Medford, MA, USA
Vincent P. Manno
Affiliation:
Tufts University, Department of Mechanical Engineering, Medford, MA, USA
Chris Barns
Affiliation:
Intel Corporation, Santa Clara, CA, USA
Mansour Moinpour
Affiliation:
Intel Corporation, Santa Clara, CA, USA
Sriram Anjur
Affiliation:
Cabot Microelectronics Corporation, Aurora, IL, USA
Ara Philipossian
Affiliation:
University of Arizona, Department of Chemical Engineering, Tucson, AZ, USA
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Abstract

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 867: Symposium W – Chemical-Mechanical Planarization-Integration, Technology and Reliability , 2005 , W2.3
Copyright
Copyright © Materials Research Society 2005

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References

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