Published online by Cambridge University Press: 25 February 2011
Scattering and desorption of In from Si(100) is investigated. Laser induced fluorescence is used to probe the desorbing and or scattered species. Auger Electron Spectroscopy is used to study the composition on the surface. The results show that at surface temperatures below 820 K a two dimensional layer of In desorbs by a half order mechanism. This is explained by assuming two dimensional In islands on the surface. Above 820 K, desorption takes place by a first order mechanism. The desorption para-meters appear to be spin-orbit state specific. The desorption energy for In 2P3/2 is 2.8 ± 0.4 eV and for In 2P½ 2.5 ± 0.2 eV. The difference is equal to the difference in the spin-orbit energy. So far no specular scattering of In is observed, suggesting that the sticking coefficients are unity.