Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2025-01-01T07:42:38.094Z Has data issue: false hasContentIssue false
  • English
  • Français

Interdigital Capacitive Array of tree-like Carbon Nanotubes on Silicon-based Membranes for Sensor Applications

Published online by Cambridge University Press:  31 January 2011

Aida Ebrahimi ,
Yaser Abdi ,
Shamsoddin Mohajerzadeh  and
Sarah Paydavosi
Aida Ebrahimi
Affiliation:
a.ebrahimi@ece.ut.ac.ir, University of Tehran, ECE, Tehran, Iran, Islamic Republic of
Yaser Abdi
Affiliation:
abdi@khayam.ut.ac.ir, University of Tehran, Tehran, Iran, Islamic Republic of
Shamsoddin Mohajerzadeh
Affiliation:
mohajer@ut.ac.ir, University of Tehran, ECE, Tehran, Iran, Islamic Republic of
Sarah Paydavosi
Affiliation:
sarap@tfl.ir, University of Tehran, ECE, Tehran, Iran, Islamic Republic of
Get access

Abstract

We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates.

After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.

Keywords

microelectro-mechanical (MEMS)nanostructureplasma-enhanced CVD (PECVD) (chemical reaction)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1179: Symposium BB – Material Systems and Processes for Three-Dimentional Micro-and Nanoscale Fabrication and Lithography , 2009 , 1179-BB06-07
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Bonard, J. M. Croci, M. Klinke, C. Conus, F. Arfaoui, I. Stockli, T. et al. , Carbon 40, 1715(2002).Google Scholar
2 Milne, M. I. Teo, K.B. Amaratunga, G.A. Legaganeux, P. et al. , J. Mater. Chem. 14, 933(2004).Google Scholar
3 Javey, A. Kim, H. Brink, M. Wang, Q. Ural, A. Guo, J. et al. , Nat Mater 4, 241(2002).Google Scholar
4 Abdi, Y. Mohajerzadeh, S. Hoseinzadegan, H. and Koohsorkhi, J. Appl. Phys. Lett. 88, 1(2006).Google Scholar
5 Abdi, Y. Mohajerzadeh, S. Koohshorkhi, J. Robertson, M.D. and Bennett, J.C. Carbon 46, 1611(2008)Google Scholar
6 Sammak, A. Azimi, S. Izadi, N. Hosseinieh, B. Khadem, and Mohajerzadeh, S. Journal of MEMS 16, 912(2007).Google Scholar
7 Weigold, J. W. Najafi, K. and Pang, S. W. Journal of MEMS 10, 532(2001).Google Scholar
8 Chae, J. Kulah, H. and Najafi, K. Journal of MEMS 14, 235(2005).Google Scholar