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Interferometric Measurements of Surface Properties During Laser Annealing

Published online by Cambridge University Press:  15 February 2011

Mario Bertolotti ,
Aldo Ferrari ,
Concetta Sibilia  and
Peter Jani
Mario Bertolotti
Affiliation:
Istituto di Fisica, Ingegneria, Università Roma, Italy and GNEQP of CNR, Italy
Aldo Ferrari
Affiliation:
Istituto di Fisica, Ingegneria, Università Roma, Italy and GNEQP of CNR, Italy
Concetta Sibilia
Affiliation:
Istituto di Fisica, Ingegneria, Università Roma, Italy and GNEQP of CNR, Italy
Peter Jani
Affiliation:
Central Research Institute for Physics of the Hungarian Academy of Sciences, Budapest, Hungary.
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Abstract

A simple interferometric method is presented which allows measurement of small vertical displacement of a surface heated by a laser beam. Calculations applied to a silicon crystal in the case of a c.w. laser show reasonable agreement with experiment. The method can be applied to assess surface temperature and thermal constants.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 13 , 1982 , 217
Copyright
Copyright © Materials Research Society 1983

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References

REFERENCES

1.Nowinski, J. L., Theory of thermoelasticity with applications – Sijthoff and Noordhoff Intern. publishers, Alphen Aan Dem Rijn, The Netherlands, 1978.Google Scholar
2.Ready, J. F., Effect of high power laser radiation, Academic Press Inc., New York, 1971.Google Scholar
2aCarslaw, H. S. and Jaeger, J. C., Conduction of Heat in Solids, Oxford Univ. Press, London 1959.Google Scholar
2bBass, M. in Physical Processes in Laser-Materials Interactions, ed. Bertolotti, M., Plenum Pu. Co. New York 1982.Google Scholar