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Lattice Parameter Determination of Textured Co81−xCr15PtxTa4 Thin Films

Published online by Cambridge University Press:  10 February 2011

B. Lu ,
S. D. Harkness ,
W. A. Lewis ,
D. E. Laughlin  and
D. N. Lambeth
B. Lu
Affiliation:
Data Storage System Center, Carnegie Mellon University, Pittsburgh, PA 15213
S. D. Harkness
Affiliation:
Intevac, Vacuum Systems Division, Santa Clara, CA 95054
W. A. Lewis
Affiliation:
Intevac, Vacuum Systems Division, Santa Clara, CA 95054
D. E. Laughlin
Affiliation:
Data Storage System Center, Carnegie Mellon University, Pittsburgh, PA 15213
D. N. Lambeth
Affiliation:
Data Storage System Center, Carnegie Mellon University, Pittsburgh, PA 15213
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Abstract

The thin films Co81−xCr15PtxTa4 with (0002) crystallographic texture have been sputter deposited with and without substrate bias. The lattice parameter of the thin films has been determined by a combination of x-ray diffraction and electron diffraction techniques. The resolution of the electron diffraction was enhanced by a digital imaging technique. The variation rate of the a lattice parameter with Pt content is consistent with Vegard's law. The change in the c lattice parameter is much greater than what is expected from Vegard's law.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 562: Symposium L – Polycrystalline Metal & Magnetic Thin Films , 1999 , 117
Copyright
Copyright © Materials Research Society 1999

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References

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