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A Leed Investigation of (111) Oriented Si, Ge and GaAs Surfaces Following Pulsed Laser Irradiation*

Published online by Cambridge University Press:  15 February 2011

D. M. Zehner ,
J. R. Noonan ,
H. L. Davis ,
C. W. White  and
G. W. Ownby
D. M. Zehner
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee
J. R. Noonan
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee
H. L. Davis
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee
C. W. White
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee
G. W. Ownby
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee
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Abstract

The low energy electron diffraction (LEED) patterns obtained from clean (111) oriented Si, Ge and GaAs single crystals subsequent to their irradiation with the output of a pulsed ruby laser in an ultra-high vacuum (UHV) environment suggest that metastable (1×1) surface structures are produced in the regrowth process. Conventional LEED analyses of the Si and Ge surfaces suggest that they terminate in registry with the bulk but that the two outermost interlayer spacings differ from those of the bulk. For the case of Si these changes are a contraction of 25.5 ± 2.5% and an expansion of 3.2 ± 1.5% between the first and second and second and third layers respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1: Symposium – Laser and Electron-Beam Solid Interactions in Materials Processing , 1980 , 111
Copyright
Copyright © Materials Research Society 1981

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Footnotes

*

Research sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract W-7405-eng-26 with Union Carbide Corporation.

References

REFERENCES

1. Zehner, D. M., White, C. W. and Ownby, G. W., Appl. Phys. Lett. 36, 56 (1980).Google Scholar
2. Zehner, D. M., White, C. W. and Ownby, G. W., Surf. Sci. 92, L67 (1980).CrossRefGoogle Scholar
3. Zehner, D. M., White, C. W. and Ownby, G. W. in: Laser and Electron Beam Processing of Materials, White, C. W. and Peercy, P. S. eds. (Academic Press, New York 1980) p. 201.CrossRefGoogle Scholar
4. Cowan, P. L. and Golovchenko, J. A., J. Vac. Sci. and Technol. 17, 1197 (1980)Google Scholar
5. Zehner, D. M., White, C. W. and Ownby, G. W., Appl. Phys. Lett. 37, 456 (1980).Google Scholar
6. Bedair, S. M. and Smith, H. P. Jr., J. Appl. Phys. 40, 4776 (1969).Google Scholar
7. Eastman, D. E., J. Vac. Sci. and Technol. 17, 492 (1980).CrossRefGoogle Scholar
8. Shih, H. D. et al. , Phys. Rev. Lett. 32, 1622 (1976);Google Scholar
8a Jepsen, D. W. et al. , Phys. Rev. (in press).Google Scholar
9. Davis, H. L., Noonan, J. R. and Jenkins, L. H., Surf. Sci. 83, 559 (1979).Google Scholar
10. Zanazzi, E. and Jona, F., Surf. Sci. 62, 61 (1977).Google Scholar
11. Zehner, D. M., Noonan, J. R., Davis, H. L. and White, C. W., submitted to J. Vac. Sci. and Technol.Google Scholar
12. Zehner, D. M., White, C. W. and Ownby, G. W., unpublished results.Google Scholar
13. Thm, J. and Cohen, M. L., Phys. Rev. B 21, 1527 (1980).Google Scholar
14. Venkatesan, T. N. C. et al. , Appl. Phys. Lett. 35, 88 (1979).Google Scholar