Hostname: page-component-78c5997874-lj6df Total loading time: 0 Render date: 2024-11-11T09:20:06.521Z Has data issue: false hasContentIssue false

Low Energy Ne Scattering Spectroscopy for Insulators, and Materials in the Electric/Magnetic Fields

Published online by Cambridge University Press:  17 June 2011

Kenji Umezawa
Affiliation:
Dept. of Physics, Osaka Prefecture University, 1-1 Gakuen-Cho, Sakai 599-8531, Japan
Shigemitsu Nakanishi
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Hideki Hayashi
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Hideaki Higashitsutsumi
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Hiroki Nagasawa
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Eisuke Narihiro
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Keiko Ogai
Affiliation:
Apco Co. Ltd., 522-10 Kitano-Cho, Hachiouji, Tokyo 192-0906, Japan
Get access

Abstract

This study describes a low-energy atom scattering system that was combined with a time-of-flight spectrometer for insulator surface structural analysis. We show one example. MgO(001) crystal was used to study the surface analysis technique and is illustrated here. Insulator surface structure is difficult to study because of the charging effects during electron or ion-beam bombardment. Nevertheless, structural analysis of insulator surfaces is very important in fundamental research as well as in technology fields.

Type
Articles
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Smith, D. P., J. Appl. Phys. 38, 340 (1967).Google Scholar
[2] Katayama, M., Nomura, E., Kanekuma, N., Soejima, H., Aono, M., Nucl. Instr. Meth. B 33, 857 (1988).Google Scholar
[3] Sumitomo, K., Oura, K., Katayama, I., Shoji, F., Hanawa, T., Nucl. Instrum. Meth. B 33, 871 (1988).Google Scholar
[4] Yoshimoto, M., Maeda, T., Shimozono, K., Koinuma, H., Shinohara, M., Ishiyama, O. and Ohtani, F., Appl. Phys. Lett. 65, 3197 (1994).Google Scholar
[5] Umezawa, K., Nakanishi, S., Kojima, K., Yoshimura, M., Ueda, K., Gibson, W. M., Phys. Rev. B 63, 035402 (2001).Google Scholar
[6] Rabalis, J. W., Low Energy Ion Surface Interactions, (Wiley, 1994).Google Scholar