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Low-cost Micro- and Nano-structures in Porous Nanomaterials Realized by Direct Imprinting of Porous Substrates

Published online by Cambridge University Press:  11 August 2011

Judson D. Ryckman ,
Marco Liscidini ,
J. E. Sipe  and
S. M. Weiss
Judson D. Ryckman
Affiliation:
Department of Electrical Engineering and Computer Science, Vanderbilt University Nashville, TN 37235, USA
Marco Liscidini
Affiliation:
Dipartimento di Fisica “A. Volta”, Università degli Studi di Pavia, via Bassi 6, 27100 Pavia, Italy
J. E. Sipe
Affiliation:
Department of Physics and Institute for Optical Sciences, University of Toronto 60 St. George St. Toronto M5S 1A7 Ontario, Canada
S. M. Weiss
Affiliation:
Department of Electrical Engineering and Computer Science, Vanderbilt University Nashville, TN 37235, USA
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Abstract

We present a simple one-step methodology for direct structuring of porous nanomaterials on the micro- and nano-scale. Our technique, direct imprinting of porous substrates (DIPS), relies on the application of a pre-patterned and reusable stamp to directly imprint porous substrates. DIPS is performed at room temperature and pressure in less than one minute, and circumvents the conventional requirement for resist processing and etching procedures. It is shown that arbitrarily shaped patterns and structures can be transferred to porous nanomaterials with a very high (sub-100nm) feature resolution that is primarily limited by the pore dimensions of the substrate material. DIPS is demonstrated on a wide variety of porous nanomaterials including metals, semiconductors, and insulators. Furthermore, DIPS can be utilized to locally modify material properties including pore dimensions, density, dielectric function, and surface roughness. Lastly, example structures fabricated by DIPS are discussed for their relevance to important applications ranging from drug delivery and imaging, to solar energy conversion, and biosensing.

Keywords

optical propertiesmicrostructurenanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1340: Symposium T – High-Speed and Large-Area Printing of Micro/Nanostructures and Devices , 2011 , mrss11-1340-t01-08
Copyright
Copyright © Materials Research Society 2011

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References

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