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Low-energy ion induced sputtering of pre-patterned fused silica surfaces

Published online by Cambridge University Press:  31 January 2011

Jens Völlner ,
Bashkim Ziberi ,
Frank Frost  and
Bernd Rauschenbach
Jens Völlner
Affiliation:
jens.voellner@iom-leipzig.de, Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany
Bashkim Ziberi
Affiliation:
bashkim.ziberi@iom-leipzig.de, Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany
Frank Frost
Affiliation:
frank.frost@iom-leipzig.de, Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany
Bernd Rauschenbach
Affiliation:
bernd.rauschenbach@iom-leipzig.de, Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany
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Abstract

Ripple formation and smoothing of pre-patterned fused silica surfaces by low-energy ion beam erosion have been investigated. As pre-pattern ripple surfaces produced by low-energy Ar+ ion beam erosion were used. In addition to the enhanced ripple formation on the pre-patterned surfaces also the smoothing characteristics of surface is changed. Due to the anisotropic surface roughness of the ripple pattern the irradiation direction with respect to the pre-pattern becomes important. It is suggested that all of these effects are related to surface gradient dependent sputtering and therefore it is an important mechanisms also in the low-energy ion beam erosion of fused silica surfaces.

Keywords

ion-beam processingsputteringscanning probe microscopy (SPM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1181: Symposium DD – Ion Beams and Nano-Engineering , 2009 , 1181-DD13-15
Copyright
Copyright © Materials Research Society 2009

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References

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