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Macroscopic Actuators Using Thick Piezoelectric Coatings

Published online by Cambridge University Press:  21 March 2011

M. Sayer ,
G.R. Lockwood ,
T.R. Olding ,
G. Pang ,
Lester M. Cohen ,
W. Ren  and
B.K. Mukherjee
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, ON, K7L 3N6, Canada
G.R. Lockwood
Affiliation:
Department of Physics, Queen's University, Kingston, ON, K7L 3N6, Canada
T.R. Olding
Affiliation:
Department of Physics, Queen's University, Kingston, ON, K7L 3N6, Canada
G. Pang
Affiliation:
Department of Physics, Queen's University, Kingston, ON, K7L 3N6, Canada
Lester M. Cohen
Affiliation:
Smithsonian Astrophysical Observatory, 60 Garden St. Cambridge, Mass. 02138, USA
W. Ren
Affiliation:
Department of Physics, Royal Military College of Canada, Kingston, ON, K7K 7B4, Canada
B.K. Mukherjee
Affiliation:
Department of Physics, Royal Military College of Canada, Kingston, ON, K7K 7B4, Canada
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Abstract

Large scale actuated structures often require piezoelectric elements in the thickness range 10-50μm. For manufacturing purposes, the chemical solution deposition of sol gel composites can create such structures using methods compatible with semiconductor fabrication technology. The piezoelectric characteristics of structures fabricated by patterning methods based on the lapping and dicing of bulk ceramic, spray coating and laser machined and micromolded sol gel composites are compared. Laser interferometer measurements on PZT/PZT composites give d33 = 200 pC/N and d31 = 24 pC/N. The design and fabrication of large area voltage actuated mirrors and annular and linear ultrasonic arrays in the frequency range of 50 MHz are demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC13.6.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Madou, M., Fundamentals of Microfabrication, (CRC Press, 1997) pp 145–Google Scholar
2. Sayer, M., Lukacs, M., Olding, T., Pang, G., Zou, L. and Chen, Y., Mat. Res. Soc. Symp. Proc. 541, 599 (1999)Google Scholar
3. Zhou, S., Liang, C. and Rogers, C.A., J. Intel. Mater. Syst. and Struct. 6, 733 (1995)Google Scholar
4. Barrow, D.A., Petroff, T.E., Tandon, R. and Sayer, M., J. Appl. Phys. 81, 876 (1997)Google Scholar
5. Barrow, D.A., Petroff, T.E. and Sayer, M., U.S.Patent #36573 (2000)Google Scholar
6. Petroff, T.E., Hesp, S. and Sayer, M., Ceram. Trans. 41, eds Levison, L.M. and Hirano, S.I., the American Ceramic Society, Westerville, OH, 1994, p337 Google Scholar
7. Sayer, M., Lukacs, M., Pang, G., Zou, L., Chen, Y. and Jen, C.K., in Piezoelectric Materials: Advances in Science, Technology and Applications, eds Gallassi, C., Dinescu, M., Uchino, K. and Sayer, M., (Kluwer, 2000) pp. 249–260 Google Scholar
8. Barrow, D.A., Lisboa, O., Jen, C.K. and Sayer, M., J. Appl. Phys. 79, 3323 (1996)Google Scholar
9. Olding, T.R., Leclerc, B. and Sayer, M., Integ. Ferroelect. 26, 225 (1999)Google Scholar
10.These structures were laser machined in a joint project with Tontch, K. and Waser, R. Google Scholar
11. Wang, Q-M, Du, X-H, Xu, B. and Cross, L.E., IEEE Trans. Ultrason. Ferroelect. and Freq. Cont 46, 638 (1999) (1978)Google Scholar
12. Lukacs, M., Olding, T.R., Sayer, M., Tasker, R. and Sherrit, S., J. Appl. Phys. 85, 2835 (1999)Google Scholar
13. Piezoelectric Resonance Analysis Program, http://www.canlink.com/tasi/tasi.html, TASI Technical Software, Kingston, Ontario, Canada (1998)Google Scholar
14.Microlithography Chemical Corporation Corp., 1254 Chestnut St. Newton, MA 02164-1418, http://www.microchem.comGoogle Scholar