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Measurements of Resonance Frequency of Parylene Microspring Arrays Using Atomic Force Microscopy

Published online by Cambridge University Press:  20 January 2011

C. Gaire ,
M. He ,
A. Zandiatashbar ,
P.-I. Wang ,
R. C. Picu ,
G.-C. Wang  and
T.-M. Lu
C. Gaire
Affiliation:
Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
M. He
Affiliation:
Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
A. Zandiatashbar
Affiliation:
Department of Mechanical, Aeronautical and Nuclear Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
P.-I. Wang
Affiliation:
Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
R. C. Picu
Affiliation:
Department of Mechanical, Aeronautical and Nuclear Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
G.-C. Wang
Affiliation:
Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
T.-M. Lu
Affiliation:
Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, U. S. A.
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Abstract

A mechanical vibration system was made by sandwiching an array of parylene-C microsprings between two flat plates of Si. This system was driven mechanically in forced oscillation using a piezo transducer attached to the bottom Si plate. An atomic force microscope was used to record the displacement of the top plate in both the contact and non-contact modes. At the resonance, the system was observed to give large vertical displacement amplitude of up to 100 nm with a Q-factor of up to 900.

Keywords

physical vapor deposition (PVD)scanning probe microscopy (SPM)actuator
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s09-03
Copyright
Copyright © Materials Research Society 2011

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References

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