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Mechanical and Material Characterization of Bilayer Microcantilever-based IR detectors

Published online by Cambridge University Press:  01 March 2011

I-Kuan Lin ,
Ping Du ,
Yanhang Zhang  and
Xin Zhang
I-Kuan Lin
Affiliation:
Global Science & Technology, Greenbelt, MD 20770, USA NASA Goddard Space Flight Center, Greenbelt, MD 20771, USA
Ping Du
Affiliation:
Department of Mechanical Engineering, Boston University, Boston, MA 02215, USA
Yanhang Zhang
Affiliation:
Department of Mechanical Engineering, Boston University, Boston, MA 02215, USA
Xin Zhang
Affiliation:
Department of Mechanical Engineering, Boston University, Boston, MA 02215, USA
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Abstract

Infrared radiation (IR) detection and imaging are of great importance to a variety of military and civilian applications. Microcantilever-based IR detectors have recently gained a lot of interest because of their potential to achieve extremely low noise equivalent temperature difference (NETD) while maintaining low cost to make them affordable to more applications. However, the curvature induced by residual strain mismatch within the microcantilever severely decreases the device performance. To meet performance and reliability requirement, it is important to fully understand the deformation of IR detectors. Therefore, the purpose of this study is threefold: (1) to develop an engineering approach to flatten IR detectors, (2) to model and predict the elastic deformation of IR detectors using finite element analysis (FEA), and (3) to study the inelastic deformation during isothermal holding.

Keywords

microelectro-mechanical (MEMS)thermal stressesplasma-enhanced CVD (PECVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s04-13
Copyright
Copyright © Materials Research Society 2011

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References

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