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Mechanical Deformation of Crystalline Silicon During Nanoindentation

Published online by Cambridge University Press:  17 March 2011

J.E. Bradby ,
J.S. Williams ,
J. Wong-Leung ,
M.V. Swain  and
P. Munroe
J.E. Bradby
Affiliation:
Department of Electronic Materials Engineering, RSPhysSE, The Austrialian National University, Canberra, ACT 0200, Australia E-mail address: jeb109@rsphysee.anu.edu.au
J.S. Williams
Affiliation:
Department of Electronic Materials Engineering, RSPhysSE, The Austrialian National University, Canberra, ACT 0200, Australia E-mail address: jeb109@rsphysee.anu.edu.au
J. Wong-Leung
Affiliation:
Department of Electronic Materials Engineering, RSPhysSE, The Austrialian National University, Canberra, ACT 0200, Australia E-mail address: jeb109@rsphysee.anu.edu.au
M.V. Swain
Affiliation:
Biomaterials Science Research Unit, Department of Mechanical and Mechatronics Engineering and Facultyof Dentistry, University of Sydny, Eveleigh, NSW 1430, Australia
P. Munroe
Affiliation:
Electron Microscope Unit, University of New South Wales, Sydney, NSW, 2052, Australia
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Abstract

Deformation during spherical and pointed indentation in (100) crystalline silicon usig a UMIS-2000 nanoindenter has been studied using cross-sectional transmission electron microscopy (XTEM), atomic force microscopy (XTEM), atomic force microscopy and Raman microspectroscopy. XTEM samples were prepard by focused ion beam milling to accurately position the cross-section through the indentations. Indentation loads were chosen below an above the yield point for silicon to investigate the modes of plastic deformation. Slip planes are visible in XTEm micrographs for all indentation loads studied but slip is not the main avenue for plastic deformation. A thin layer of poly-crystalline material has been identified (indexed as Si-XII from diffraction patterns) on the low load indentation, just prior to yield (pop-in during loading). For loading above the yield point, a large region of amorphous silicon was observed directly under the indenter when fast unloading conditions were used. The various microstructures and phase observed below indentations are correlated with load/unload data.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 649: Symposium Q – Fundamentals of Nanoindentation & Nanotribology II , 2000 , Q8.10
Copyright
Copyright © Materials Research Society 2001

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References

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