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Mechanical Properties Of Ferro-Electric Composite Thin Films

Published online by Cambridge University Press:  10 February 2011

C. G. Fountzoulas  and
S. Sengupta
C. G. Fountzoulas
Affiliation:
U.S. Army Research Laboratory, Materials Division, APG, MD, 21005–5069.
S. Sengupta
Affiliation:
U.S. Army Research Laboratory, Materials Division, APG, MD, 21005–5069.
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Abstract

Ferro-electric (BSTO) films of 1 μm nominal thickness were deposited on single crystals of sapphire at substrate temperatures varying from 30 °C to 700 °C. Optical analysis showed that the thin films were amorphous up to 500 °C, while at 700 °C they were polycrystalline. The microstructure of the thin films was columnar at all substrate temperatures. The film microhardness increased with increasing substrate temperature. While the cohesion failure load of the films remained fairly constant, the adhesion failure load increased with increasing substrate temperature.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 505 , 1997 , 337
Copyright
Copyright © Materials Research Society 1998

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References

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