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Metastability in SiGe/Si Strained-Layer Structures

Published online by Cambridge University Press:  28 February 2011

Brian W. Dodson
Brian W. Dodson*
Affiliation:
Sandia National Laboratories Albuquerque, NM 87185
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Abstract

The physics governing growth and stability properties in SiGe/Si strainedlayer structures is reviewed. The role of metastability in crystal growth is outlined. Experimental data on stability limits and rates of strain relaxation are examined. We conclude that essentially all observations on relaxation of semiconductor strained-layer structures can be explained by standard models of plastic deformation adapted to the special conditions controlling dislocation dynamics in these structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 116 , 1988 , 491
Copyright
Copyright © Materials Research Society 1988

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References

1 Grabow, M.H. and Gilmer, G.H., Surf. Sci. 194, 333 (1988).Google Scholar
2 Bean, J.C., Sheng, T.T., Feldman, L.C., Fiory, A.T., and Lynch, R.T., Appl. Phys. Lett. 44, 102 (1984).CrossRefGoogle Scholar
3 Frank, W., Gosele, U., Mehrer, H., and Seeger, A., in Diffusion in Crystalline Solids, Murch, G.E. and Nowick, A.S., Eds (Academic, New York, 1984).Google Scholar
4 Frank, F.C. and Merwe, J.H. van der, Proc. Roy. Soc. A198, 216 (1949).Google Scholar
5 Matthews, J.W. and Blakeslee, A.E., J. Xtal. Gro. 27, 118 (1974).Google Scholar
6 Tsao, J.Y., Dodson, B.W., Picraux, S.T., and Cornelison, D.M., Phys. Rev. Lett. 59, 2455 (1987).Google Scholar
7 Dodson, B.W. and Taylor, P.A., Appl. Phys. Lett. 49, 642 (1986).CrossRefGoogle Scholar
8 Grabow, M.H. and Gilmer, G.H., in Layered Structures and Epitaxy, Gibson, J.M., Osbourn, G.C., and Tromp, R.M. eds. (MRS, Pittsburgh, 1986).Google Scholar
9 Dodson, B.W., Appl. Phys. Lett. (in press).Google Scholar
10 Biefeld, R.M., Hills, C.R., and Lee, S.R., J. Xtal Gro. (in press).Google Scholar
11 Dodson, B.W., J. Xtal. Gro. (in press).Google Scholar
12 Sugita, Y., Tamura, M., and Sugawara, K., J. Vac. Sci. Tech. 6, 585 (1969).Google Scholar
13 Matthews, J.W., Mader, S., and Light, T.B., J. Appl. Phys. 41, 3800 (1970).Google Scholar
14 Kasper, E., Herzog, H.J., and Kibbel, H., Appl. Phys. 8, 199 (1975).Google Scholar
15 Bean, J.C., Feldman, L.C., Fiory, A.T., Nakahara, S., and Robinson, I.K., J. Vac. Sci. Tech. A2, 436 (1984).CrossRefGoogle Scholar
16 Fiory, A.T., Bean, J.C., Hull, R., and Nakahara, S., Phys. Rev. B31, 4063 (1985).Google Scholar
17 Kohama, Y., Fukuda, Y., and Seki, M., Appl. Phys. Lett. L2, 380 (1988).CrossRefGoogle Scholar
18 Gourley, P.L., Fritz, I.J., and Dawson, L.R., Appl. Phys. Lett. 52, 377 (1988).CrossRefGoogle Scholar
19 Fritz, I.J., Appl. Phys. Lett. 51, 1080 (1987).Google Scholar
20 Alexander, H. and Haasen, P., in Solid State Physics (Academic, New York, 1968), Vol 22.Google Scholar
21 Dodson, B.W. and Tsao, J.Y., Appl. Phys. Lett. 51, 1325 (1987) and Erratum (in press).Google Scholar
22 Patel, J.R., Disc. Faraday Soc. 38, 201 (1964); F.A. Ponce, T. Yamashita, and S. Hahn, Appl. Phys. Lett. 43, 1051 (1983).Google Scholar
23 Dodson, B.W., Appl. Phys. Lett. (in press).Google Scholar
24 People, R. and Bean, J.C., Appl. Phys. Lett. 47, 322 (1985).CrossRefGoogle Scholar
25 Dodson, B.W., J. Xtal. Gro. (in press).Google Scholar
26 Frost, H.J. and Ashby, M.F., Deformation-Mechanism Maps (Pergammon, Oxford, 1982).Google Scholar
27 Dodson, B.W. and Tsao, J.Y., Phys. Rev. B (in press).Google Scholar
28 Kamigaki, K., Sakashita, H., Kato, H., Nakayama, M., Sano, N., and Terauchi, H., Appl. Phys. Lett. 49, 1071 (1986).Google Scholar
29 Orders, P.J. and Usher, B.F., Appl. Phys. Lett. 50, 980 (1987).Google Scholar