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A Method for Non-Intrusively Determining ion Impact Current Density and Energy Distribution in Capacitively Coupled RF Plasmas

Published online by Cambridge University Press:  25 February 2011

S. E. Savas
S. E. Savas*
Affiliation:
Lawrence Berkeley Laboratory, Berkeley, Cal. 94720
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Abstract

The dependence of ion current density on the sheath voltage and thickness, and ion energy distributions as functions of the pressure and sheath voltage amplitude have been calculated using a self-consistent computer code, ISHEATH. The current density is found to obey an approximate power law dependence on the amplitude of the sheath voltage, Vs, and the sheath thickness, d, and, when charge exchange collisions are considered, on the collision parameter α ΞNgas · σcx ·d. The ion energy distribution (IED) is found to mainly depend on α: for α ≃l there is only a slight (≃10%) change from the collisionless case; for a ≤ 10 the IED is peaked at an energy which is much less than the time-average sheath potential.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 61
Copyright
Copyright © Materials Research Society 1987

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References

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