Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-10T10:26:13.377Z Has data issue: false hasContentIssue false
  • English
  • Français

A Mew Variable Angle Ft—ir Ellipsometer

Published online by Cambridge University Press:  22 February 2011

J.L. Stehle ,
O.T. Thomas ,
J.P. Piel ,
P. Evrard ,
J.H. Lecat  and
L.C. Hammond
J.L. Stehle
Affiliation:
SOPRA, 26/68 Rue Pierre Joigneaux, 92270 BOIS—COLOMBES, FRANCE
O.T. Thomas
Affiliation:
SOPRA, 26/68 Rue Pierre Joigneaux, 92270 BOIS—COLOMBES, FRANCE
J.P. Piel
Affiliation:
SOPRA, 26/68 Rue Pierre Joigneaux, 92270 BOIS—COLOMBES, FRANCE
P. Evrard
Affiliation:
SOPRA, 26/68 Rue Pierre Joigneaux, 92270 BOIS—COLOMBES, FRANCE
J.H. Lecat
Affiliation:
SOPRA, 26/68 Rue Pierre Joigneaux, 92270 BOIS—COLOMBES, FRANCE
L.C. Hammond
Affiliation:
ARIES/QEI, 5A1 Damonmill Square, Concord MA 01742, USA
Get access

Abstract

Use of a Fourier—transform interferometer integrated with a variable incidence angle ellipsometer extends the spectral range and the capabilities of spectroscopic ellipsometry into the infrared. With a spectral range of 600 to 6600 cm—1, thick layers, such as epitaxial doped layers and polymers can be analysed.

A full description of this novel instrument will be given. Incidence angle can be variedautomatically to enhance signal/noise and the ellipsometric data can be obtained together with vibrational absorption bands information to give a characteristic “fingerprint ” of the layers.

Examples of spectra of HCN polymer on nickel, DMHS on aluminium and PMMA on silicon willbe presented for various incidence angles and layer thickness.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 171: Symposium O – Polymer Based Molecular Composites , 1989 , 349
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

(1) Beattie, J.R Phil. Mag. 46 235 (1955)Google Scholar
(2) Stobie, R.W, Rao, B., and Dignam, M.J. Applied Optics Vol 14, No 4, (1975) 999 Google Scholar
(3) Roseler, A. Infrared Physics 21 349 (1981)Google Scholar
(4) Dignam, M.J., Rao, B., Moskovits, M., and Stobie, R.W. Can. J. Chem. 49, 1115 (1971)Google Scholar
(5) Martin, A.E Vol 9 in Vibrational Spectra and Structure Ed Durig, J.R, Elsevier.Google Scholar
(6) Jungk, G. and Roseler, A. Phys.Stat.Sol (b) 137, 117, (1986)Google Scholar
(7) Andrieu, S., D'Avitaya, F. Arnaud Surface Science 219 (1989) 277–293 Google Scholar
(8) Benfehrat, R., Drevillon, B. and Robin, P. MRS BOSTON Fall Meeting 1-6 Dec 1986.Google Scholar
(9) Drevillon, B. and Benferhat, R. J.Appl.Phys. 63 (1988) 5088 Google Scholar
(10) Ferrieu, F. and Devine, R.A.B To be published in J.Non-Crystalline SolidsGoogle Scholar
(11) Ferrieu, F. Rev. Sci. Instrum. 60 (1989) 3212 Google Scholar