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Microfabricated Crevice Former with a Sensor Array

Published online by Cambridge University Press:  15 March 2011

Xiaoyan Wang ,
Robert G. Kelly  and
Michael L. Reed
Xiaoyan Wang
Affiliation:
Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904-4743, U.S.A.
Robert G. Kelly
Affiliation:
Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22904-4745, U.S.A.
Michael L. Reed
Affiliation:
Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA 22904-4743, U.S.A.
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Abstract

Microfabrication of crevice corrosion samples is of importance in developing an accurate, comprehensive, and reliable crevice corrosion model, and real-time acquisition of corrosion information is also essential. Solid-state microsensor arrays have been used for detecting potential, pH, and ion concentrations, and their integration into crevice corrosion testing samples will provide real-time spatial information of crevice corrosion. The crevice corrosion testing sample is constructed by coupling a crevice former to a crevice substrate and has a uniform crevice gap. In this paper we present a crevice former incorporating a potentiometric, ion- selective membrane microelectrode pH sensor array. The crevice former is built on a silicon wafer using microelectromechanical systems (MEMS) fabrication and thin film semiconductor processing techniques, and consists of an array of five independent sensing microelectrodes. The array configuration allows for in-situ spatial pH analysis of crevice corrosion based on information from each sensor. The fabrication details of the crevice former with microelectrode sensor will be elaborated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B5.41
Copyright
Copyright © Materials Research Society 2002

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References

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