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Micro-Raman Study of Pb(Zr,Ti)O3 Thin Films in Feram

Published online by Cambridge University Press:  10 February 2011

Takahiro Kimura ,
Yoshimasa Horii ,
Tomoji Nakamura  and
Koichiro Honda
Takahiro Kimura
Affiliation:
Fujitsu Laboratories Ltd., 10–1 Morinosato-Wakamiya, Atsugi, Kanagawa, Japan
Yoshimasa Horii
Affiliation:
Fujitsu Laboratories Ltd., 10–1 Morinosato-Wakamiya, Atsugi, Kanagawa, Japan
Tomoji Nakamura
Affiliation:
Fujitsu Laboratories Ltd., 10–1 Morinosato-Wakamiya, Atsugi, Kanagawa, Japan
Koichiro Honda
Affiliation:
Fujitsu Laboratories Ltd., 10–1 Morinosato-Wakamiya, Atsugi, Kanagawa, Japan
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Abstract

We examined the Raman spectra of the tetragonal Pb(Zr, Ti)O3 (PZT) films between FeRAM cells with a micro-Raman apparatus. We found that a Raman light peaked at 600cm−1 polarized linearly perpendicular to the polarization of the exciting light had a different intensity for each of the film.

We showed that the difference in the intensities can be explained by the differing distributions of grain orientations in the films. Based on this knowledge, we estimated the volume fraction of 90° domains as well as the average spontaneous polarization of the grains.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 417
Copyright
Copyright © Materials Research Society 1999

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References

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