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Microscopical Study of Au Nanocrystals Self-Assembled on (100)Si and SiO2/(100)Si Substrates

Published online by Cambridge University Press:  01 February 2011

Emanuela Piscopiello ,
Leander Tapfer ,
Marco Vittori Antisari ,
Pasquale Paiano ,
Paola Prete  and
Nicola Lovergine
Emanuela Piscopiello
Affiliation:
emanuela.piscopiello@brindisi.enea.it, ENEA, Dept. Advanced Physics Technology and New Materials (FIM), Strada Statale Appia, Brindisi, I-72100, Italy
Leander Tapfer
Affiliation:
leander.tapfer@brindisi.enea.it, ENEA, Dept. Advanced Physics Technology and New Materials (FIM), Strada Statale Appia, Brindisi, I-72100, Italy
Marco Vittori Antisari
Affiliation:
vittori@casaccia.enea.it, ENEA, Dept. Advanced Physics Technology and New Materials (FIM), Via Anguillarese 301, Roma, I-00060, Italy
Pasquale Paiano
Affiliation:
pasquale.paiano@unile.it, University of Lecce, CNISM-Research Unit of Lecce and Dept. of Innovation Engineering, via Arnesano, Lecce, I-73100, Italy
Paola Prete
Affiliation:
paola.prete@le.imm.cnr.it, CNR, IMM-Institute for Microelectronics and Microsystems, via Arnesano, Lecce, I-73100, Italy
Nicola Lovergine
Affiliation:
nico.lovergine@unile.it, University of Lecce, CNISM-Research Unit of Lecce and Dept. of Innovation Engineering, via Arnesano, Lecce, I-73100, Italy
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Abstract

This work reports on the structural characterization of Au nanocrystals directly prepared on the surface of (100)Si and 150 nm-thick SiO2 deposited (100)Si substrates, by a physical self-assembly method, consisting in the UHV evaporation of a thin Au film and its successive high temperature annealing. The morphology, orientation, and crystalline structure of Au nanocrystals were characterized by scanning and high-resolution transmission electron microscopy and X-ray diffraction, respectively. Experimental results show that the nature of the substrate strongly influences the process of Au nanocrystal formation upon heat treatment, by affecting the interaction of deposited Au with the underlying material. In the case of clean (100)Si substrates the Au strongly interacts with Si, so that Au nanoislands are obtained with a well defined epitaxial relationships with the substrate, i.e. [100]AuÐÐ[110]Si and [110]AuÐÐ[311]Si. The nanoisland shape is affected by faceting at the Au/Si interface, the Au nanocrystal being limited by the {111}, {311}, {711} and {-111} planes of Si. In the case of SiO2/(100)Si substrates spherical shaped Au nanoparticles with random crystal orientation are instead, produced.

Keywords

Aunanostructuretransmission electron microscopy (TEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 959: Symposium M – Quantum Dots—Growth, Behavior and Applications , 2006 , 0959-M17-26
Copyright
Copyright © Materials Research Society 2007

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References

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