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Microsphere-assisted Fabrication of Ultra-high Aspect-ratio PDMS Micropillars for Bio-inspired Acoustic Sensing

Published online by Cambridge University Press:  24 February 2015

Jungwook Paek  and
Jaeyoun Kim
Jungwook Paek
Affiliation:
Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa, USA
Jaeyoun Kim
Affiliation:
Department of Electrical and Computer Engineering, Iowa State University, Ames, Iowa, USA
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Abstract

We developed a new soft-lithographic fabrication technique which enables the realization of high aspect-ratio PDMS micropillars. The key enabling factor is the adoption of the direct drawing technique incorporated with the in situ heating for simultaneous hardening and solidification of the PDMS micropillars. In addition, our technique allows self-aligned installation of highly reflective microspheres at the tips of the micropillars. Using the transparent PDMS micropillar as a flexible waveguide and the microsphere as a self-aligned reflector, we transformed the microsphere-tipped PDMS micropillars into all optically interrogated acoustic sensors inspired by the cricket’s filiform hairs and successfully demonstrated the sensing capability.

Keywords

microstructurebiomimetic (assembly)sensor
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1749: Symposium JJ – 3D Mesoscale Architectures—Synthesis, Assembly, Properties and Applications , 2015 , mrsf14-1749-jj01-08
Copyright
Copyright © Materials Research Society 2015 

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References

REFERENCES

Miller, J. P., Krueger, S., Heys, J. J. and Gedeon, T.,“Quantitative Characterization of the Filiform Mechanosensory Hair Array on the Cricket Cercus”,PLoS ONE6, e27873 (2011)CrossRefGoogle ScholarPubMed
Dijkstra, M. et al. ,“Artificial sensory hairs based on the flow sensitive receptor hairs of crickets”,J. Micromech. Microeng., 15, S132 (2005).CrossRefGoogle Scholar
Große, S., Schröder, W., and Brücker, C. “Nano-newton drag sensor based on flexible micro-pillars”, Meas. Sci. Technol., 17, 2689–2697 (2006).CrossRefGoogle Scholar
Taylor, R. E., Kim, K., Sun, N., Park, S. J., Sim, J. Y., Fajardo, G., Bernstein, D., Wu, J. C., and Pruitt, B. L. “Sacrificial layer technique for axial force post assay of immature cardiomyocytes”, Biomed Microdevices, 15, 171–181 (2013).CrossRefGoogle ScholarPubMed
Cheng, Q., Sun, Z., Meininger, G. A., and Almasri, “M. Note: Mechanical study of micromachined polydimethylsiloxane elastic microposts”, Rev. Sci. Instrum., 81, 106104 (2010).CrossRefGoogle Scholar
Roca-Cusachs, P., Rico, F., Martínez, E., Toset, J., Farré, R., and Navajas, D. “Stability of Microfabricated High Aspect Ratio Structures in Poly(dimethylsiloxane)”, Langmuir, 21, 5542–5548 (2005).CrossRefGoogle Scholar
Paek, J. and Kim, J., “Microsphere-assisted fabrication of high aspect-ratio elastomeric micropillars and waveguides”, Nature Communications, 5, 3324 (2014).CrossRefGoogle ScholarPubMed
Gates, R. S. and Pratt, J. R. “Accurate and precise calibration of AFM cantilever spring constants using laser Doppler vibrometry”, Nanotechnology, 23, 375702 (2012).CrossRefGoogle ScholarPubMed
Sasoglu, F. M., Bohl, A. J., and Layton, B. E. “Design and microfabrication of a high-aspect-ratio PDMS microbeam array for parallel nanonewton force measurement and protein printing”, J. Micromech. Microeng., 17, 623–632 (2007).CrossRefGoogle Scholar