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Published online by Cambridge University Press: 26 February 2011
Amorphous optical thin films of mixed oxides have been fabricated whose composition and optical index of refraction have been varied in a controlled manner as a function of film thickness using a single ion beam source with tailored composition targets. The microstructure, transformation behavior, and stress in the films are being studied for the systems Al2O3-TiO2, TiO2-SiO2, and ZrO2-SiO2. The technique has been found to be a convenient means of producing gradient index optical structures.