Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-10T04:59:15.785Z Has data issue: false hasContentIssue false
  • English
  • Français

Modeling and Simulation of a High Frequency MEMS-Fabricated Ultrasonic Nozzle

Published online by Cambridge University Press:  01 February 2011

S. C. Tsai ,
T.K. Tseng ,
Y. L. Song ,
Y. F. Chou ,
C. S. Tsai  and
P.Z. Chang
S. C. Tsai
Affiliation:
Dept. of Chemical Engineering, California State Univ., Long Beach, CA
T.K. Tseng
Affiliation:
Institute of Applied Science and Engineering Research, Academia Sinica, Taipei, Taiwan
Y. L. Song
Affiliation:
Institute of Applied Science and Engineering Research, Academia Sinica, Taipei, Taiwan
Y. F. Chou
Affiliation:
Dept of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
C. S. Tsai
Affiliation:
Institute of Applied Science and Engineering Research, Academia Sinica, Taipei, Taiwan Dept. of Electrical and Computer Engineering, Univ. of California, Irvine, CA
P.Z. Chang
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan
Get access

Abstract

This paper reports on the design and simulation of micro-fabricated 0.5 MHz Si-based ultrasonic nozzles that consist of multiple sections of Fourier horns of half wavelength design. Such high frequency ultrasonic nozzles should produce 10-15μm-diameter uniform precursor drops for nanoparticle synthesis by means of spray pyrolysis at ambient pressure. Results of 3-D simulation using a commercial FEM program, ANSYS, show existence of one resonant frequency of pure longitudinal vibration, which is very close to the design value. The results also show that at this resonant frequency increase in vibration amplitude at the nozzle tip is very close to the theoretical values of 2n, where n is the number of horn section. Therefore, the required electric drive power should be drastically reduced and the transducer failure in ultrasonic atomization can be more readily avoided.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 729: Symposium U – MEMS and BioMEMS , 2002 , U5.3
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] “Micromachined Silicon Ultrasonic Atomizer,” Lal, A. and White, R.M., Proceedinngs of IEEE Ultrasonics Symposium, 1, 339–342, 1996.Google Scholar
[2] “Ultrasound-Modulated Twin-Fluid Atomization of a Liquid Jet,” Tsai, S.C., Luu, P., Childs, P., and Tsai, C.S., IEEE Transaction on Ultrasonics/Ferroelectrics and Frequency Control, 46, 139–146, 1999; U.S. Patent #5,687,905, 1997, S.C. Tsai.Google Scholar
[3] “Nanoparticles Synthesis Using Air-Assisted Ultrasonic Spray Pyrolysis,” Tsai, S.C., Song, Y.L., Tsai, C.S., Yang, C.C., Chiu, W.Y., and Lin, H.M., to appear in AIChE J. (J. of American Institute of Chemical Engineers), 48, 2002.Google Scholar
[4] “Flow Visualization of Taylor-Mode Breakup of a Viscous Liquid Jet,” Tsai, S.C., Luu, P., Tam, P., Roski, Gerald, and Tsai, C.S., AIP Physics of Fluids, 11, 1331–1341, 1999.Google Scholar
[5] “Design of Sonic Amplitude Transformers for High Magnification,” Eisner, E., J. of the Acoust. Society of America, 35, 1367–1377, 1963.Google Scholar
[6] Acoustic Fields and Waves in Solids, Vol. 1, Chapter 8, “Piezoelectricity”, Auld, B.A., Wiley-Interscience Publication, John Wiley and Sons, NY, 1973.Google Scholar
[7] “Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium,” Wortman, J.J. and Evans, R.A., J. of Applied Physics, 36, 153–156, 1965.Google Scholar