Published online by Cambridge University Press: 10 February 2011
The composition evolution in nanoscale layered systems during annealing is considered within the framework of the Cahn-Hilliard theory. Starting from as-deposited multilayers with morphologically rough and chemically diffuse coherent interfaces, the sharpening of concentration profiles and the flattening of interphase boundaries have been simulated. Grain boundary grooving within multilayers was supposed to initiate break-throughs in individual layers and the subsequent morphological development has been analyzed. The simulations reveal a deterioration of the layered structure by the fusion of individual layers.