Published online by Cambridge University Press: 01 February 2011
We present preliminary results of a theoretical investigation of the thermal conductivity of polycrystalline GaN films. It is assumed that grain boundaries play a major role in limiting the thermal conductivity, which is calculated using the phonon-hopping transport approach. The effect of the grain size, size dispersion, and inter-grain interface structure on the thermal conductivity values is analyzed. The obtained results are compared with available experimental data for polycrystalline films and model predictions for crystalline GaN films.