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Molecular Dynamics Investigations of Boron Doping in a-Si:H
Published online by Cambridge University Press: 15 February 2011
Abstract
The rather low doping efficiency of B in a-Si:H is almost always explained by the argument that almost all of the B is incorporated into three-fold coordinated sites and that B is inert or non-doping in this configuration. Using ab initio molecular dynamics, we have studied the energetics and doping (electronic structure) consequences of B incorporation into a-Si:H both with and without H passivation. Our results suggest that the conventional view is in error and that the low doping efficiency is primarily due to H passivation. These results are consistent with the low doping efficiency of B as well as NMR studies on the large electric field gradients experienced by the B atoms and on NMR double resonance studies of B-H neighboring distances.
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- Copyright © Materials Research Society 1997