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Morphology of E-Beam Evaporated Cr Thin Films

Published online by Cambridge University Press:  21 February 2011

Y. Cheng ,
M. B. Stearns  and
David J. Smith
Y. Cheng
Affiliation:
Physics Department, Arizona State University, Tempe, AZ 85287
M. B. Stearns
Affiliation:
Physics Department, Arizona State University, Tempe, AZ 85287
David J. Smith
Affiliation:
Also at Center for Solid State Science.
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Abstract

Studies were made of the structural dependence on the growth rate and substrate temperature of Cr thin films prepared by e-beam evaporation. The d-spacings and the average size of the crystallites were determined from large angle x-ray scattering spectra. Detailed studies of the morphology were made by cross-sectional high resolution transmission electron microscopy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 151
Copyright
Copyright © Materials Research Society 1990

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References

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4. Cheng, Y. (unpublished).Google Scholar
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