Hostname: page-component-6bf8c574d5-956mj Total loading time: 0 Render date: 2025-02-22T23:22:34.740Z Has data issue: false hasContentIssue false
  • English
  • Français

The nature of ripples and islands in strained SiGe/Si heteroepitaxy: nucleation vs. instability phenomena

Published online by Cambridge University Press:  10 February 2011

S.H. Christiansen ,
M. Albrecht ,
M. Becker ,
H.P. Strunk  and
H. Wawra
S.H. Christiansen
Affiliation:
Institut für Werkstoffwissenschaften -Mikrocharakterisierung-, Universität Erlangen, Cauerstr.6, 91058 Erlangen, Germany e-mail: sechrist ww.uni-erlangen.de
M. Albrecht
Affiliation:
Institut für Werkstoffwissenschaften -Mikrocharakterisierung-, Universität Erlangen, Cauerstr.6, 91058 Erlangen, Germany
M. Becker
Affiliation:
Institut für Werkstoffwissenschaften -Mikrocharakterisierung-, Universität Erlangen, Cauerstr.6, 91058 Erlangen, Germany
H.P. Strunk
Affiliation:
Institut für Werkstoffwissenschaften -Mikrocharakterisierung-, Universität Erlangen, Cauerstr.6, 91058 Erlangen, Germany
H. Wawra
Affiliation:
Institut für Kristallzüchtung, Rudower Chaussee 6, 12489 Berlin, Germany
Get access

Abstract

Using liquid phase epitaxy from Bi solution in the temperature range 550°–700°C at low growth rates we study the formation of ripples and islands and their interdependence. As main results we find from the dependencies on growth time and temperature that ripples are an instability phenomenon and that islands nucleate thermally activated. Island nucleation on a ripple template (that is, as an instability phenomenon, highly ordered) has huge impact on the achievable order of the islands.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 570: Symposium V – Epitaxial Growth , 1999 , 199
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Asaro, R.J., Tiller, W.A., Metall.Trans. 3, 1789 (1972); M. Grinfeld, Sov.Phys.Dokl. 31, 831 (1986); D.J. Srolovitz, Acta metall. 37, 621 (1989);Google Scholar
[2] Luryi, S., Suhir, E., Appl.Phys.Lett. 49, 140 (1986) D.J. Eaglesham, M. Cerullo, Phys.Rev.Lett. 64, 1943 (1990); D. Vanderbilt, L.K. Wickham, Mat.Res.Soc.Symp.Proc. 202, 555 (1991) C. Ratsch, A. Zangwill, Surf.Sci. 293, 123 (1993) S. Christiansen, M. Albrecht, P.O. Hansson, E. Bauser, H.P. Strunk, Appl.Phys.Lett. 66, 574 (1995);Google Scholar
[3] Cullis, A.G., Robbins, D.J., Pidduck, A.J., Smith, P.W., Mat.Res.Soc.Symp.Proc. 280, 383 (1993); A.G. Cullis, D.J. Robbins, A.J. Pidduck, P.W. Smith, J.Cryst.Growth 123, 333 (1992)Google Scholar
[4] Chen, K.M., Jesson, D.J., Penneycook, S.J., Thundat, T., Warmack, R.J., Mat.Res.Soc.Symp.Proc. 399, 271 (1996); D.J. Jesson, K.M. Chen, S.J. Pennycook, T. Thundat, R.J. Warmack, Phys.Rev.Lett. 77, 1330 (1996)Google Scholar
[5] Tersoff, J., LeGoues, F.K., Phys.Rev.Lett. 72, 3570 (1994).Google Scholar
[6] Ross, F.M., Tersoff, J., Tromp, R.M., Phys.Rev.Lett. 80, 984 (1998).Google Scholar
[7] Floro, J.A., Chason, E., Twesten, R.D., Hwang, R.Q., Freund, L.B., Phys.Rev.Lett. 79, 3946 (1997).Google Scholar
[8] Becker, R., Theorie der Wäirme, Springer Verlag Berlin, Heidelberg, New York 1978 Google Scholar
[9] Floro, J.A., Chason, E., Twesten, R.D., Hwang, R.Q., Phys.Rev. B 59, 1990 (1998).Google Scholar
[10] Walther, T., Humphreys, C.J., Cullis, A.G., Appl.Phys.Lett. 71, 809 (1997);.Google Scholar
[11] Gao, H., J.Mech.Phys.Solids 42, 741 (1994);.Google Scholar
[12] Bauser, E. in: Handbook of crystal growth, Vol. 3b, Ed. Hurle, D.T.J. (North Holland, Amsterdam, 1994), p- 879 Google Scholar
[13] Dorsch, W., Steiner, B., Albrecht, M., Strunk, H.P., Wawra, H., Wagner, G., J.Cryst.Growth 183, 305 (1998).Google Scholar
[14] Strunk, H.P., Christiansen, S., Albrecht, M., Mat.Res.Soc.Symp.Proc. 399, 313 (1996).Google Scholar
[15] Christiansen, S., Albrecht, M., Strunk, H.P., Computational Material Science 7, 213 (1996).Google Scholar
[16] Christiansen, S., Albrecht, M., Strunk, H.P., Hansson, P.O., Bauser, E., Appl.Phys.Lett. 66, 574 (1995).Google Scholar
[17] Christiansen, S., Albrecht, M., Michler, J., Strunk, H.P., phys.stat.sol (a) 156, 129 (1996).Google Scholar
[18] Wollkind, D.J., Segel, L.A., Philos. Trans.Royal.Soc. London A 268, 33 (1970).Google Scholar
[19] Spencer, B.J., Davis, S.H., Voorhees, P.W., Phys.Rev.B 47, 9760 (1993).Google Scholar