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A novel functionalization of AlGaN/GaN-pH-Sensors for DNA-sensors

Published online by Cambridge University Press:  31 January 2011

Stefanie Linkohr ,
S. U. Schwarz ,
S. Krischok ,
P. Lorenz ,
T. Nakamura ,
V. Polyakov ,
V. Cimalla ,
C. Nebell  and
O. Ambacher
Stefanie Linkohr
Affiliation:
stefanie.linkohr@iaf.fraunhofer.de
S. U. Schwarz
Affiliation:
Albert-Ludwigs-University of Freiburg, Department of Microsystems Engineering (IMTEK) 79108 Freiburg, Germany
S. Krischok
Affiliation:
Institute of Micro- and Nanotechnologies, Technical University Ilmenau, P.O. Box 100565, Germany
P. Lorenz
Affiliation:
Institute of Micro- and Nanotechnologies, Technical University Ilmenau, P.O. Box 100565, Germany
T. Nakamura
Affiliation:
Institute of Micro- and Nanotechnologies, Technical University Ilmenau, P.O. Box 100565, Germany
V. Polyakov
Affiliation:
AIST Tsukuba Central 1 Tsukuba, Ibaraki 305-8561, Japan
V. Cimalla
Affiliation:
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany, stefanie.linkohr@iaf.fraunhofer.de
C. Nebell
Affiliation:
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany, stefanie.linkohr@iaf.fraunhofer.de
O. Ambacher
Affiliation:
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany, stefanie.linkohr@iaf.fraunhofer.de
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Abstract

AlGaN/GaN pH sensitive devices were functionalized and passivated for the use as selective bio-sensors. For the passivation, a multilayer of SiO2 and SiNx is proposed, which stabilizes the pH-sensor, is biocompatible and has no negative impact on the following bio-functionalization. The functionalization of the GaN-surface was achieved by covalent bonding of 10-amino-dec-1-ene molecules by a photochemical process. After two different surface preparations islands of TFAAD are growing on the sensor surface by exposure with UV-light. In dependence on the surface pre-treatment and the illumination wavelength the first monolayer is completed after 3 h or 7 h exposure time dependent on the pre-treatment and illumination wavelength. Further exposure results in thicker films as a consequence of cross polymerization. The bonding to the sensor surface was analyzed by X-ray photoelectron spectroscopy, while the thickness of the functionalization was determined by atomic force microscopy scratching experiments. These functionalized devices based on the pH-sensitive AlGaN/GaN ISFET will establish a new family of adaptive, selective biomolecular sensors such as selective, reusable DNA sensors.

Keywords

III-Vsensorbiological
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1202: Symposium I – III-Nitride Materials for Sensing, Energy Conversion and Controlled Light-Matter Interactions , 2009 , 1202-I06-02
Copyright
Copyright © Materials Research Society 2010

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