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Optical Indices of Hydride of Mg-Ca Alloy Thin Films Evaluated by Spectroscopic Ellipsometry

Published online by Cambridge University Press:  18 August 2011

Y. Yamada
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Anagahora 2266-98, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
K. Tajima
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Anagahora 2266-98, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
M. Okada
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Anagahora 2266-98, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
M. Tazawa
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Anagahora 2266-98, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
A. Roos
Affiliation:
Department of Engineering Sciences, The Ångström Laboratory, Uppsala University, 751 21 Uppsala, Sweden
K. Yoshimura
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Anagahora 2266-98, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
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Abstract

Mg1-zCaz (0.03 < z < 0.17) alloy thin films covered with thin Pd are hydrogenated using 4% H2 in Ar under atmospheric pressure at room temperature. The optical indices, which are refractive indices and extinction coefficients, in the wavelength between 250 and 1700 nm of these hydrides were evaluated with spectroscopic ellipsometry. The evaluated refractive indices were about 2.0 for all hydrides, while the extinction coefficients showed the values less than 0.06 in the visible range for hydride with Ca composition of z ≤ 0.08 and the coefficients increased sharply to more than 0.3 with Ca composition z > 0.08.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

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